@InProceedings{MST-Chem:2005,
  author = 	 {Heiko Wolfram and Hendrik Specht and Ralf Schmiedel and
                  Torsten Aurich and Wolfram D\"otzel},
  title = 	 {Implementation Issues on MEMS -- {A} Study on System Identification},
  booktitle = 	 {7. Chemnitzer Fachtagung Mikromechanik \& Mikroelektronik},
  pages = 	 {64--71},
  year = 	 2005,
  address = 	 {Chemnitz, Germany},
  month = 	 oct # {~26--27,},
  organization = {Chemnitz University of Technology},
  ISBN =         {3-00-016889-3}
  language =     {english},
}