- AutorIn
- Thomas Waechtler
- Shao-Feng Ding
- Lutz Hofmann
- Robert Mothes
- Qi Xie
- Steffen Oswald
- Christophe Detavernier
- Stefan E. Schulz
- Xin-Ping Qu
- Heinrich Lang
- Thomas Gessner
- Titel
- ALD-grown seed layers for electrochemical copper deposition integrated with different diffusion barrier systems
- Zitierfähige Url:
- https://nbn-resolving.org/urn:nbn:de:bsz:ch1-qucosa-68040
- Quellenangabe
- Microelectronic Engineering, 88, 2011, 5, S. 684-689, DOI: 10.1016/j.mee.2010.07.004
- Erstveröffentlichung
- 2011
- ISSN
- 0167-9317
- Abstract (EN)
- The deposition of Cu seed layers for electrochemical Cu deposition (ECD) via atomic layer deposition (ALD) of copper oxide and subsequent thermal reduction at temperatures between 110 and 120°C was studied on different diffusion barrier systems. While optimization of the process is required on TaN with respect to reduction and plating, promising results were obtained on blanket PVD Ru. The plating results on layers of ALD Cu with underlying Ru even outperformed the ones achieved on PVD Cu seed layers with respect to morphology and resistivity. Applying the processes to via and line patterns gave similar results, suggesting that a combination of ALD Cu with PVD or ALD-grown Ru could significantly improve the ECD Cu growth.
- Andere Ausgabe
- Microelectronic Engineering, 88, 2011, 5, S. 684-689
Link: http://dx.doi.org/10.1016/j.mee.2010.07.004 - Freie Schlagwörter (DE)
- Atomlagenabscheidung, ALD, Kupferoxid, Ruthenium, Keimschicht, Kupfer, Reduktion, Galvanik, Kupferbeschichtung, Metallisierung, Leitbahnsystem, Galvanisieren
- Freie Schlagwörter (EN)
- Atomic layer deposition, ALD, Copper oxide, Reduction, Seed layer, Copper, Ruthenium, Electrochemical deposition, ECD, Interconnect
- Klassifikation (DDC)
- 600
- 620
- 621
- Normschlagwörter (GND)
- Beschichten, Verkupferung, Atomlagenabscheidung, Ruthenium, Kupfer, Metallisieren, Leiterbahn, ULSI
- Herausgeber (Institution)
- Fraunhofer-Institut für Elektronische Nanosysteme ENAS, Chemnitz
- Technische Universität Chemnitz, Chemnitz
- Fudan University, Shanghai
- Ghent University, Ghent
- Leibniz-Institut für Festkörper- und Werkstoffforschung IFW, Dresden
- Verlag
- Elsevier B.V., Amsterdam
- URN Qucosa
- urn:nbn:de:bsz:ch1-qucosa-68040
- Veröffentlichungsdatum Qucosa
- 18.05.2011
- Dokumenttyp
- Preprint
- Sprache des Dokumentes
- Englisch