- Titel
- Investigation of Wafer-Level Electromagnetic Heating of Metallic Frames at Radio Frequencies
- Untertitel
- Analysis and Characterization of Standing Waves
- Zitierfähige Url:
- https://nbn-resolving.org/urn:nbn:de:bsz:ch1-qucosa2-955259
- Übersetzter Titel (DE)
- Untersuchung der elektromagnetischen Erwärmung von Metallrahmen auf Wafer-Ebene bei Radiofrequenzen : Analyse und Charakterisierung stehender Wellen
- Konferenz
- 20th International Conference on Electrification of Industrial Thermal and Manufacturing Processes. Nizza (Frankreich), 08.-11.10.2024
- Erstveröffentlichung
- 2024
- DOI
- https://doi.org/10.60687/2025-0021
- Abstract (EN)
- The research provides concise insights into the thermal effects induced by standing waves. Through a combination of numerical FE simulations and experimental validations, the study comprehensively analyzes the distribution of EM fields, standing wave patterns, and resulting temperature profiles within the metallic frames. These findings offer crucial insights a lead to practical implications and limitations of the heating phenomena of several metallic structures at wafer-level, facilitating advancements in MEMS packaging processes. Further research regarding the coil, generator and process parameter optimization will be based on the presented results.
- Forschungsdatenverweis
- Inductive Heating Based on VHF-ISM Radio Band Frequencies as Technology Platform for Efficient Heating of Metallic Micro-Scaled Bonding Layers in MEMS Packaging
DOI: 10.1109/TMAG.2023.3286208
Link: https://ieeexplore.ieee.org/document/10153084 - Freie Schlagwörter (DE)
- elektromagnetische Erwärmung, Waver-Level, Stehende Wellen, Radiofrequenz, VHF
- Freie Schlagwörter (EN)
- electromagnetic heating, waver-level, standing waves, radio frequency, VHF
- Klassifikation (DDC)
- 680
- 681
- 688
- Normschlagwörter (GND)
- Bonden
- Induktive Erwärmung
- Herausgeber (Institution)
- Technische Universität Chemnitz
- Sonstige beteiligte Institution
- International Union for Electricity Applications (UIE), Hannover
- Version / Begutachtungsstatus
- publizierte Version / Verlagsversion
- URN Qucosa
- urn:nbn:de:bsz:ch1-qucosa2-955259
- Veröffentlichungsdatum Qucosa
- 04.02.2025
- Dokumenttyp
- Konferenzbeitrag
- Sprache des Dokumentes
- Englisch
- Lizenz / Rechtehinweis
- Inhaltsverzeichnis
1. Introduction 2. Problem description 3. Preliminary results 4. Conclusions 5. References 6. Authors